电子半导体超纯水系统
Electronic semiconductor water system
当今，半导体、集成电路芯片及封装、液晶显示、高精度线路板、光电器件、各种电子器件、微电子工业、大规模、超大规模集成电路需要大量的纯水、超纯水清洗成品、半成品。集成电路的集成度越高，线宽越窄，对水质的要求也越高。目前我国电子工业部把电子级水质技术分为五个行业等级，分别为18.2MΩ·cm、15MΩ·cm、10MΩ·cm、2MΩ·cm、0.5MΩ·cm，以区分不同水质。其中，对于超纯水要求最关键的指标：电导率（电阻率），总硅，PH值，颗粒度等。因此，线路板、电路板使用纯水、超纯水因为本身工艺流程的不同对超纯水制造的工艺也不同，所以，杭州欧泉科技有公公司会根据客户的要求，设计适合客户用水的设备方案。
Nowadays, semiconductors, integrated circuit chips and packages, liquid crystal displays, high-precision circuit boards, optoelectronic devices, various electronic devices, microelectronic industry, large-scale and ultra large-scale integrated circuits need a lot of pure water, ultra pure water cleaning products and semi-finished products. The higher the integration of integrated circuit, the narrower the line width, and the higher the requirement of water quality. At present, the Ministry of electronic industry of China divides the electronic grade water quality technology into five industry grades, which are 18.2m Ω· cm、15M Ω· cm、10M Ω· cm、2M Ω· cm、0.5M Ω· Cm to distinguish different water quality. Among them, for ultra pure water, the most critical indicators are conductivity (resistivity), total silicon, pH value, particle size, etc. Therefore, pure water and ultrapure water are used in circuit boards and circuit boards. Due to different process flow, the manufacturing process of ultrapure water is also different. Therefore, Hangzhou Ouquan Technology Co., Ltd. will design equipment scheme suitable for customers' water consumption according to customers' requirements.
工艺流程图
特征
电子半导体超纯水系统设备通常有多介质过滤器，活性炭过滤器，精密过滤器等构成预处理系统，RO反渗透主机系统，离子交换混床（EDI电除盐系统）系统等构成主要设备系统。水箱设有液位控制系统、水泵设有高低压压力保护装置、在线水质检测控制仪表、电气采用模块化组合PLC，及通信远程输送至中控室上位机，实现现场就地和集中控制两种操作方式，同时在工艺选材上采用推荐和客户要求相统一的方法，使该设备与其他同类产品相比较，具有更高的性价比和设备可靠性。
Electronic semiconductor ultra pure water system equipment usually consists of multi-media filter, activated carbon filter, precision filter and so on to constitute the pretreatment system, RO reverse osmosis host system, ion exchange mixed bed (EDI electric desalting system) system and so on to constitute the main equipment system. The water tank is equipped with liquid level control system, the water pump is equipped with high and low pressure protection device, online water quality detection and control instrument, modular combined PLC is used for electricity, and communication is used for remote transmission to the upper computer in the central control room to realize two operation modes of on-site local control and centralized control. At the same time, the method of unifying recommendation and customer require - ments is adopted in process material selection, Compared with other similar products, the equipment has higher cost performance and reliability.
应用领域
电子化学品，集成电路，光刻机，以及泛半导体行业用水等。
Electronic chemicals, integrated circuits, lithography machines, and water for the pan-semiconductor industry.
